Ever thinner films are subject to damage from hot carrier effects at their interfaces resulting from locally high electric fields. We have developed several deuterium-based products to help you manage these new demands and improve the life of the device by a factor as high as 50.
- Deuterium (D2)
- Deuterated silane (SiD4)
- Deuterated ammonia (ND3)
Availability and specifications may vary by location. Please contact your local Linde representative for more information.